| 摘要 |
A disk assembly of an ion implantation equipment is provided to prevent sticking error and damage of a wafer by using a control unit for generating an interlock control signal. A disk(30) rotates in one direction. A wafer receiving unit(40) receives a wafer at an edge of the disk. A fence(42) supports the circumference of the wafer perpendicular to a diameter direction of the disk to be formed at a side of the wafer receiving unit so that the wafer is not separated by the rotation of the disk. A finger(44) is formed so as to tightly attach the wafer, which is received on the wafer receiving unit at the other side of the wafer receiving unit opposite to the fence, to the fence. A sensor(50) is formed on the center of the wafer receiving unit to detect that the wafer tightly attached to the fence by the finger is received on the fence, or is formed on a sidewall of the fence to directly detect that the circumference of the wafer is tightly attached to the fence. A control unit determines whether or not the wafer is tightly attached to the fence by using a detection signal of the wafer detected by the sensor. When the wafer is not tightly attached to the fence, the control unit rotates the disk to output an interlock control signal to the ion implantation equipment so that an ion implantation process is not performed.
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