| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method which enables the washing of a material to be washed so as to remove only an adherend on the material to be washed without applying a damage such as etching or the like to the material to be washed. SOLUTION: The washing method includes a laser irradiation process for irradiating the material to be washed with a laser with the output and moving speed of a range which does not exert effect on the material to be washed itself but can evaporate the adherend on the material to be washed to evaporate the adherend on the material to be washed. COPYRIGHT: (C)2007,JPO&INPIT
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