发明名称 Method for fabricating TFT array substrate
摘要 An exemplary method for fabricating a thin film transistor (TFT) array substrate includes: providing an insulating substrate; forming a plurality of gate electrodes and a plurality of reflective patterns on the insulating substrate using a first photo-mask process; forming a gate insulating layer, an amorphous silicon layer, a doped amorphous silicon layer, and a source/drain metal layer on the insulating substrate having the gate electrodes and the reflective patterns; forming a plurality of source electrodes and a plurality of drain electrodes on the doped amorphous silicon layer; depositing a passivation layer on the source electrodes, the drain electrodes and the gate insulating layer; and forming a pixel electrode on the passivation layer.
申请公布号 US2007138472(A1) 申请公布日期 2007.06.21
申请号 US20060642042 申请日期 2006.12.18
申请人 INNOLUX DISPLAY CORP. 发明人 YAN TZU-MIN;LAI CHIEN-TING
分类号 H01L29/04 主分类号 H01L29/04
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