| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a stacked piezoelectric element capable of easily forming such structure as effectively reduces the stress caused by a piezoelectric displacement for excellent durability and reliability. <P>SOLUTION: The manufacturing method of a stacked piezoelectric element includes, at forming a ceramic laminate, an intermediate laminate forming process in which a green sheet 110 which is a piezoelectric layer and an internal electrode layer 20 are alternately stacked to form an intermediate laminate 100, and a baking process in which the intermediate laminate 100 is baked to form a ceramic laminate. In the intermediate laminate forming process, a polymeric part 108 and a non-polymeric part 109 are formed at the intermediate laminate 100, and a void 40 is formed in advance at least at a part of the portion that comes to be the non-polymeric part 109. In the baking process, a relax layer containing the void 40 is formed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
