发明名称 Device and method for cutting an assembly
摘要 A method is presented for cutting an assembly that includes two layers of material having a first surface and a second surface. The method includes providing a weakened interface between the two layers that defines an interface ring about the periphery of the assembly, providing a high-pressure zone at the interface ring, and providing at least one controllable low-pressure zone in the vicinity of at least one of the first surface and the second surface. The technique also includes supplying the high-pressure zone with a controllable high-pressure force, and attacking the interface ring with at least one mechanical force in combination with the high-pressure force to cut the assembly.
申请公布号 US7232738(B2) 申请公布日期 2007.06.19
申请号 US20040886436 申请日期 2004.07.06
申请人 S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES S.A. 发明人 RAYSSAC OLIVIER;LETERTRE FABRICE
分类号 B28D5/04;H01L21/46;B28D5/00;H01L21/20;H01L21/762 主分类号 B28D5/04
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