摘要 |
The method for generating radicals comprises: feeding F<SUB>2 </SUB>gas or a mixed gas of F<SUB>2 </SUB>gas and an inert gas into a chamber of which the inside is provided with a carbon material, supplying a carbon atom from the carbon material by applying a target bias voltage to the carbon material, and thereby generating high density radicals, wherein the ratio of CF<SUB>3 </SUB>radical, CF<SUB>2 </SUB>radical and CF radical is arbitrarily regulated by controlling the target bias voltage applied to the carbon material while measuring the infrared absorption spectrum of radicals generated inside the chamber.
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