| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable-shape mirror in which the peeling of a film is prevented between a substrate and an electrode film formed on the substrate, and between a piezoelectric film and an electrode film formed on the piezoelectric film. <P>SOLUTION: A variable-shape mirror 6 has a driver portion 13, which includes a piezoelectric film 9 and a first electrode film 8 and a second electrode film 10 that sandwich the piezoelectric film 9 therebetween, and a substrate 7 arranged on the first electrode film 8 to support the driver portion 13. As the driver portion 13 is driven, the shape of a mirror film 12 is varied. The substrate 7 is formed of at least one material selected from the group of Si, SiO<SB>2</SB>, and MgO. The piezoelectric film 9 is formed of PZT or of a perovskite oxide that contains Nb and that is the same kind as PZT. The first electrode film 8 is formed of a plurality of layers of different compositions, and, of those layers, the one formed on the substrate 7 is a metal layer of a composition containing at least one element selected from the group of Ti, Cr, and W and the one formed on the piezoelectric film 9 is a metal layer of a composition containing at least one element selected from the group of Pt, Ir, and Ru. <P>COPYRIGHT: (C)2007,JPO&INPIT |
