发明名称 Microelectromechanical thin-film device
摘要 Processing and systems to create, and resulting products related to, very small-dimension singular, or monolithically arrayed, semiconductor mechanical devices. Processing is laser performed on selected semiconductor material whose internal crystalline structure becomes appropriately changed to establish the desired mechanical properties for a created device.
申请公布号 US7230306(B2) 申请公布日期 2007.06.12
申请号 US20050058501 申请日期 2005.02.14
申请人 发明人
分类号 B81C1/00;H01L29/84;C30B13/00;C30B35/00;H01L21/20;H01L21/268;H01L49/00 主分类号 B81C1/00
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