| 摘要 |
PROBLEM TO BE SOLVED: To selectively transport three kinds of wafers different in size with preventing the sideslip of the wafer. SOLUTION: Four sets of first to fourth rollers 9-10 are mounted on a rotary shaft 4. Their diameters increase toward both ends of the shaft from its midpoint. For transporting a 5-inch wafer 1, it is laid on first rollers 7 only between a pair of second rollers 8, and the rollers 8 prevent the sideslip. For transporting a 6-inch wafer 2, it is laid on the second rollers 8 only between a pair of third inner rollers 9, and the rollers 9 prevent the sideslip. For transporting an 8-inch wafer 3, it is laid on the third rollers 9 only between a pair of fourth rollers 10, and the rollers 10 prevent the sideslip. COPYRIGHT: (C)2007,JPO&INPIT
|
