| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a linear head module having a mechanism for stopping output shaft rotation which ensures easy and rapid mounting on the equipment, uniform temperature at each output shaft, uniform air cooling of each output shaft, reduction of cost and mass in case of many numbers of shafts, as well as long lifetime and superior controllability. <P>SOLUTION: A coil 3b of a linear motor is fixed to the inner surface of a pipe 11, and many pipes 11 are integrated by placing them among a frame 8, a cover 9 and an intermediate seat 12. A guide composed of a ball spline and a linear bush is attached to the output side and its opposite side of the frame 8. Further, the intermediate seat 12 is divided into two areas, that is the output side and its opposite side, and a space is provided between two divided areas of the intermediate seat 12, then an area passing through the space is provided at both sides of the frame 8. <P>COPYRIGHT: (C)2007,JPO&INPIT |
