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发明名称
METHOD FOR FORMING STORAGENONODE CONTACT PLUG IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20070055878(A)
申请公布日期
2007.05.31
申请号
KR20050114363
申请日期
2005.11.28
申请人
HYNIX SEMICONDUCTOR INC.
发明人
HWANG, CHANG YOUN;KIM, HYUNG HWAN;CHOI, IK SOO;LEE, HAE JUNG
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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