METHOD OF CORRECTING LIQUID DROPLET LANDING POSITION IN LIQUID DROPLET EJECTION APPARATUS, LIQUID DROPLET EJECTION APPARATUS, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To highly accurately obtain angle correction data for correcting the rotation of a head unit comprising a plurality of functional liquid droplet ejection heads. SOLUTION: A method of correcting a liquid droplet landing position in a liquid droplet ejection apparatus comprises: an inspection-landing step of landing functional liquid droplets for inspection respectively from at least two functional liquid droplet ejection heads onto an inspection area W of an inspection workpiece according to ejection pattern data for alignment; a landing position recognizing step of image-recognizing the landing position of each of functional liquid droplets for inspection; a landing error acquiring step of comparing the ejection pattern data for alignment with image recognition data of the landing positions which are image-recognized at the landing position recognizing step and acquiring a landing error of each of functional liquid droplets for inspection; and an angle correction data preparing step of preparing angle correction data for correcting the rotation of the head unit to theθ-axis direction on the basis of the landing error acquired at the landing error acquiring step. COPYRIGHT: (C)2007,JPO&INPIT