发明名称 |
Gap adjustment apparatus and gap adjustment method for adjusting gap between two objects |
摘要 |
A first stage and a second stage are disposed to face each other. A first object is fixed on the first stage. A first displacement sensor attached on the first stage is used to measure a distance extending from the first displacement sensor to a plane disposed in front of the first displacement sensor. A second object is fixed on the second stage. A second displacement sensor attached on the second stage is used to measure a distance extending from the second displacement sensor to a plane disposed in front of the second displacement sensor. A moving mechanism is provided to move one of the first stage and the second stage, with the movement of one stage being relative to the other stage.
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申请公布号 |
US7225048(B2) |
申请公布日期 |
2007.05.29 |
申请号 |
US20040911474 |
申请日期 |
2004.08.05 |
申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
LI XUAN |
分类号 |
G03F7/20;G06F19/00;G05B11/01;H01L21/68 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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