发明名称 Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use
摘要 A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.
申请公布号 US7224504(B2) 申请公布日期 2007.05.29
申请号 US20030629798 申请日期 2003.07.30
申请人 ASML HOLDING N. V. 发明人 GOVIL PRADEEP K;GUZMAN ANDREW
分类号 G02B5/10;G02B26/08;G02B5/08;H01L21/027 主分类号 G02B5/10
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