Displacement sensor with temperature compensation, e.g. for coordinate measurement, has additional reference measuring surfaces, thermally coupled to main measuring surfaces, and evaluation circuit deriving compensated displacement signal

摘要

The sensor is constructed with inductive elements formed on a PCB (10), their actual inductance depending on the position of two metallic plates (44, 46) that are rigidly connected with one another. Movement of the plates alters the inductance of a conductive track (12), but scarcely affects that of an additional track (28) which is perpendicular to the first. Since the inductance of the additional track is however, affected similarly by temperature, this may be used to provide a compensation for such ambient changes.