发明名称 Structure of bumps forming on an under metallurgy layer and method for making the same
摘要 The present invention relates to a structure of bumps forming on an under bump metallurgy layer (UBM layer) and a method for making the same. The structure comprises a wafer, a UBM layer, a second photo resist and a bump. The wafer has a plurality of solder pads and a protection layer, and the protection layer covers the surface of the wafer and exposes parts of the solder pads. The UBM layer is disposed on the solder pads and the protection layer and has an undercut structure. The second photo resist is disposed in the undercut structure. The bump is disposed on the UMB layer. Whereby, the UMB layer will not be reacted with bump in a reflow process and the problem of stress concentration will be avoided so as to make the bump more stable.
申请公布号 US2007117368(A1) 申请公布日期 2007.05.24
申请号 US20060601684 申请日期 2006.11.20
申请人 TSAI CHI-LONG;LU WAN-HUEI 发明人 TSAI CHI-LONG;LU WAN-HUEI
分类号 H01L21/44;H01L23/48 主分类号 H01L21/44
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