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发明名称
VACUUM CHUCK
摘要
申请公布号
JPH05285763(A)
申请公布日期
1993.11.02
申请号
JP19920090667
申请日期
1992.04.10
申请人
NIPPON STEEL CORP
发明人
YASUNAGA NOBUO;ABE KOZO
分类号
B23Q3/08;(IPC1-7):B23Q3/08
主分类号
B23Q3/08
代理机构
代理人
主权项
地址
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