| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of making a probe card provided with a sufficient height and a sufficient needle pressure capable of freely setting the layout of the probe or the number of probes. SOLUTION: The method includes a step of forming a probe unit by arranging a plurality of adjoining probes on a first substrate at prescribed intervals, and a step of arranging a prescribed number of probe units on a second substrates, so as to arrange the prescribed number of probes on the second substrate. Thereby, the probes and the first substrate are arranged vertically, and the probe and the wiring provided on the second substrate are directly connected. COPYRIGHT: (C)2007,JPO&INPIT
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