PARTICLE -OPTICAL COMPONENT

摘要

The present invention relates to a particle-optical component comprising a first multi -aperture plate (613), and a second multi- aperture plate (614) forming a gap between them; wherein a plurality of apertures (615) of the first multi -aperture plate is arranged such that each aperture of the plurality of apertures of the first multi-aperture plate is aligned with a corresponding aperture of a plurality of apertures of the second multi-aperture plate; and wherein the gap has a first width (wl) at a first location and a second width (w2) at a second location and wherein the first width is by at least 5% greater than the second width. In addition, the present invention pertains to charged particle systems and arrangements comprising such components and methods of manufacturing multi aperture plates having a curved surface .