IMPRINTING APPARATUS AND IMPRINTING METHOD

摘要

An imprinting apparatus and imprinting method in which, even when the degree of parallelism between the surface of a die for imprinting and the surface of a work to be molded is low, pressing can be conducted while automatically improving the degree of parallelism. This imprinting apparatus is characterized by having a work-holding part for holding a work to be molded and a die-supporting part for supporting a die having a fine structure. It is further characterized by having a constitution in which when the work and the die are brought close to each other and pressing is conducted in order to transfer the fine structure to the work, a pressing force is applied through a deformation mechanism which is deformed by the pressing-direction force.