| 摘要 |
PROBLEM TO BE SOLVED: To provide a miniature silicon transducer which can provide hard acoustic seal in which low frequency roll-off of the transducer is controlled preferably. SOLUTION: Multiple embodiments of solid state micro-structures, such as a condenser microphone, are disclosed. According to one embodiment, the transducer includes a fixed perforated member, a freely movable diaphragm spaced from the perforated member, a support ring in the perforated member maintaining the proper spacing between the diaphragm and the perforated member near the perimeter; and compliant suspension springs allowing the diaphragm to rest freely on the support ring and yet mechanically decouples the diaphragm from the perforated member. According to another embodiment, a raised micro-structure is disclosed for use in a silicon based device. The raised micro-structure comprises a generally planar film having a ribbed sidewall supporting the film. COPYRIGHT: (C)2007,JPO&INPIT
|
