| 摘要 |
A polishing pad conditioner having a polishing pad lifetime detecting apparatus and a polishing pad lifetime detecting method are provided to detect abrasion of a polishing pad through air pressure of a polishing conditioner by installing an air pressure detecting sensor, a controlling unit, and a displayer on the polishing conditioner. A conditioner head(1) is contacted to a polishing pad to perform a polishing process. A housing(2) and a cover(3) wrap the conditioner head. A conditioner rotational apparatus(4) rotates the conditioner head. A conditioner swing apparatus(6) swings the conditioner head at a certain angle. An air supplying apparatus(5) maintains a certain pressure in the conditioner head. A pressure detecting sensor(7) is installed on the air supplying apparatus. A controlling unit analyzes the signal received from the pressure detecting sensor. A displayer(8) displays an abnormality of air pressure to the outside.
|
