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发明名称
Sputtering apparatus and method for regenerating thereof
摘要
申请公布号
KR100715934(B1)
申请公布日期
2007.05.08
申请号
KR20000025728
申请日期
2000.05.15
申请人
发明人
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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