| 摘要 |
FIELD: plasma engineering; methods and the devices for deposition of the multilayered coatings on the sheet glass. ^ SUBSTANCE: the invention is pertaining to the plasma engineering, in particular, to the method and the device for deposition of the multilayered modifying coatings made out of the metals, their oxides, nitrides and other compounds on the sheet glass and may be used for change and improvement of the optical properties of the sheet glass. The technical result of the invention is the increased productivity and efficiency of operation of all the assemblies of the device. The device contains the mounted in series first sluice chamber, the vacuum lock, the working chamber with the magnetron spray system, the second vacuum lock, the second sluice chamber, which are connected with the system of the vacuum-pumping and injection of the working gas. In the both sluice chambers there are cartridges with the plug-in accumulators for arrangement of the batch of the processed sheet glass. Transferring the sheets of the glass from one cartridge into another and vice versa with the minimum clearance between them conduct the sequential deposition of each layer of the coating onto each sheet of the whole batch of the sheet glass. The change of the gas medium of the working area is made once for the whole batch for each layer. ^ EFFECT: the invention ensures the increased productivity and efficiency of operation of all the assemblies of the device. ^ 4 cl, 3 dwg |
