发明名称 Mask-less method of forming aligned semiconductor wafer features
摘要 A method of forming features in a semiconductor is disclosed. The method includes providing a wafer substrate including a surface having a reflective region, and coating the surface with a photosensitive layer. The method additionally includes exposing the photosensitive layer. The method further includes controlling exposure intensity such that the photosensitive layer has an exposed area only in an area adjacent the reflective region.
申请公布号 US2007092810(A1) 申请公布日期 2007.04.26
申请号 US20050257276 申请日期 2005.10.24
申请人 ZAIDI SHOAIB 发明人 ZAIDI SHOAIB
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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