| 摘要 |
PROBLEM TO BE SOLVED: To suppress deformation of plates when coupling pieces are cut. SOLUTION: For manufacturing a passage unit, etching is carried out to six flat plates formed of a metal to be plate materials 101-106. A plurality of plates 11-16 each formed with a frame 111, a plurality of the coupling pieces 115 and a predetermined pattern are formed in respective plates. Etching is further carried out to the six flat plates, thereby forming four slits 131-134 in a pair of long side parts 112a of the frame 111. The plate materials 101-106 are thus fabricated. Next, the plate materials 101-106 layered in a positioning layering state are heated to a predetermined temperature. At the same time, the plates 101-106 are pressured in a layering direction to be diffusion joined to each other. Then, the plurality of coupling pieces 115 are cut by bending the pair of long side parts 112a, whereby a laminate of the plates 11-16 is separated from the frames 111. COPYRIGHT: (C)2007,JPO&INPIT
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