BOARD FOR MEASURING PARALLELISM BETWEEN SURFACES OF UPPER AND LOWER SURFACE PLATES, SYSTEM FOR MEASURING PARALLELISM BETWEEN SURFACES OF UPPER AND LOWER SURFACE PLATES, AND METHOD FOR ADJUSTING DISTANCE BETWEEN SURFACES OF UPPER AND LOWER SURFACE PLA

摘要

A board (3) for accurately and easily measuring a parallelism between the surfaces of upper and lower surface plates. A plurality of mounting parts for measuring units (32) are formed on a board body (31). Each of the measuring units (32) comprises a displacement mechanism part having an upward biased displacement element displacing according to the distance between the surface of an upper surface plate (21) and the surface of a lower surface plate (22), a distance-between-upper-and-lower-surface-plates measuring part for digitally measuring a displacement value A of the displacement element equivalent to a minimum distance between the surfaces of the upper surface plate (21) and the lower surface plate (22), and a measured result output part outputting the measured results by the distance-between-upper-and-lower-surface-plates measuring part (122).