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发明名称
METHOD AND APPARATUS
摘要
담체 가스에서의 증기 단계에서 금속-포함 전구체 화합물의 일정한 농도를 제공하는 방법이 개시된다. 이러한 방법은 가스 금속-포함 화합물의 일정한 농도를 복수 개의 증착 반응기들에 공급하는 데에 특히 유용하다.
申请公布号
KR101636000(B1)
申请公布日期
2016.07.04
申请号
KR20100028006
申请日期
2010.03.29
申请人
롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨
发明人
우엘크 에그버트;디카를로 로날드 엘.
分类号
C23C14/24;C23C14/54;C23C16/448;C23C16/52;C30B25/14;H01L21/02
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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