METHOD AND APPARATUS FOR FABRICATION OF SUPERCONDUCTOR FILM BY SPRAY PYROLYSIS CHEMICAL VAPOR DEPOSITION METHOD,申请号KR20060094910-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR FABRICATION OF SUPERCONDUCTOR FILM BY SPRAY PYROLYSIS CHEMICAL VAPOR DEPOSITION METHOD
摘要
申请公布号	KR20070042447(A)	申请公布日期	2007.04.23
申请号	KR20060094910	申请日期	2006.09.28
申请人	KOREA POLYTECHNIC UNIVERSITY	发明人	LEE, HEE GYOUN;HONG, GYE WON;KIM, HO JIN
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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