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发明名称
VORRICHTUNG ZUR PLASMAGESTÜTZTEN BEARBEITUNG VON OBERFLÄCHEN PLANARER SUBSTRATE
摘要
申请公布号
AT358329(T)
申请公布日期
2007.04.15
申请号
AT20020708154T
申请日期
2002.01.16
申请人
FORSCHUNGS- UND APPLIKATIONSLABOR PLASMATECHNIK GMBH DRESDEN
发明人
KUSKE, JUERGEN;STEPHAN, ULF;KOTTWITZ, ALFRED;SCHADE, KLAUS
分类号
H05H1/46;C23C16/509;H01J37/32;H01L21/205;H01L21/3065;(IPC1-7):H01L21/00
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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