| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording disk capable of surely preventing film thickness irregularities when forming a thin film by an immersion film forming method on the surface of a substrate for a magnetic recording disk of a relatively small outer diameter dimension. SOLUTION: When forming the thin film such as a lubricating layer on the surface of the substrate 10 for the magnetic recording disk by an immersion method, in the state of supporting the plurality of substrates 10 for the magnetic recording disk by a substrate support 300 inserted to a center hole 111, an immersion operation into a liquid chemical for forming the lubricating layer and a pull-up operation from the liquid chemical are performed. At the time, a vibration preventing tool 400 is arranged on the lower side of the substrates 10 for the magnetic recording disk. In the vibration preventing tool 400, a linear body 420 is disposed so as to be close to the lower end parts of both surfaces of the substrate 10 for the magnetic recording disk to an arm part 310. COPYRIGHT: (C)2007,JPO&INPIT
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