| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid transportation system capable of restricting leakage of the vibration pressure generated in a chamber of a micropump to parts more upstream and/or more downstream a pressure absorbing section. SOLUTION: In this fluid transportation system, each of a fluid reservoir 24 and a flow path 26 are communicated with both ends of the chamber 21 of the micropump 31, which is provided with a diaphragm driven by a piezoelectric element 30, through throttle flow paths 22 and 23, and the fluid is transported from a flow-in opening 12 to a flow-out opening 14 by drive of the piezoelectric element 30. The fluid reservoir 24 functions as the pressure absorbing section, and a filter part 25 is provided on the upstream side thereof. A pressure absorbing section 27 is provided on a downstream side of the flow path 26, and a narrow part 28 is provided on a downstream side of the pressure absorbing section 27 to narrow a flow path cross sectional area. COPYRIGHT: (C)2007,JPO&INPIT
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