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发明名称
POLY-SILICON FILM MANUFACTURING METHOD
摘要
申请公布号
KR100709104(B1)
申请公布日期
2007.04.12
申请号
KR20060033398
申请日期
2006.04.13
申请人
TERASEMICON CORPORATION
发明人
JANG, TAEK YONG;LEE, BYOUNG IL;LEE, YOUNG HO
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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