| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring method and a measuring device capable of measuring a refractive index distribution (homogeneity) of a specimen, in particular, a higher order component of homogeneity precisely. <P>SOLUTION: In the measuring device, comprising a reference plate and a reflection plate, reflected light from the reference plate is allowed to interfere with reflected light(s) from the specimen and/or the reflection plate to measure the refractive index distribution of the specimen arranged between the reference plate and the reflection plate. The measuring device has an angle adjustment mechanism for adjusting the angle of the specimen to the light axis of the reference plate and the reflection plate. The angle adjustment mechanism passes through the specimen, and can rotatably hold the specimen with a point on a plane perpendicular to the light axis of the reference plate and the reflection plate as a rotation center. <P>COPYRIGHT: (C)2007,JPO&INPIT |
