发明名称 SENSOR AND DEVICE USING SAME
摘要 <p>Sensors having uniform characteristics and perform stable measurement in a solution, and a device using such sensors are provided. On one end side of a substrate, one of electrodes arranged on both planes of a piezoelectric plate is fixed to be covered through a space. The substrate is formed by stacking a plurality of flat plates to have a shape that extends from the piezoelectric plate.</p>
申请公布号 WO2007037386(A1) 申请公布日期 2007.04.05
申请号 WO2006JP319495 申请日期 2006.09.29
申请人 ULVAC, INC.;WAGATSUMA, MICHIRU;TANAKA, MASARU 发明人 WAGATSUMA, MICHIRU;TANAKA, MASARU
分类号 G01N5/02 主分类号 G01N5/02
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