| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor for detecting pressure having accuracy, by reducing that foreign matters, such as dust contained in a measuring gas adheres to a pressure detecting part. SOLUTION: The pressure sensor 1 for detecting the pressure of the gas, by storing a pressure detection element 30 in a package 5 comprises a base plate 10 arranged vertically of the package 5, a cover body 15 and an inner plate 12 arranged in the inside of the package 5. A gas inlet hole 20 is provided in the base plate 10, a gas inlet chamber 21 surrounded by the base plate 10 and the inner plate 12 is formed, a ventilation hole 22 communicating with the gas inlet chamber 21 is provided in the inner plate 12, and a pressure detection chamber 23 surrounded with the inner plate 12 and the cover body 15 is formed. COPYRIGHT: (C)2007,JPO&INPIT
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