| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection data processor capable of processing inspection data obtained from an inspection device for a film, into more convenient one. SOLUTION: This inspection data processor is displayed with a defect map 19 indicating a position of a defect on a film, and a defect histogram 21 indicating a distribution of the defects on the film. The inspection data of an optional area 31 is extracted out of the inspection data, when the optional area 31 is assigned by an input of an operator. The defect map 19 and the defect histogram 21 are displayed, based on the extracted inspection data. COPYRIGHT: (C)2007,JPO&INPIT
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