发明名称 Method for fabricating optical devices by assembling multiple wafers containing planar optical waveguides
摘要 An optical device comprises a first substrate wafer with at least one buried optical waveguide on an approximately flat planar surface of the substrate and a second substrate wafer with at least a second buried optical waveguide. The waveguides so formed may be straight or curved along the surface of the wafer or curved by burying the waveguide at varying depth along its length. The second wafer is turned (flipped) and bonded to the first wafer in such a manner that the waveguides, for example, may form an optical coupler or may cross over one another and be in proximate relationship along a region of each. As a result, three dimensional optical devices are formed avoiding the convention techniques of layering on a single substrate wafer.
申请公布号 US7200303(B2) 申请公布日期 2007.04.03
申请号 US20050215851 申请日期 2005.08.31
申请人 发明人
分类号 G02B6/26 主分类号 G02B6/26
代理机构 代理人
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