| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a long electrode of an atmospheric-pressure plasma treatment apparatus, having a sectional shape with high bending rigidity. <P>SOLUTION: The atmospheric-pressure plasma treatment apparatus is provided with the electrode 30. The electrode 30 is extended in a first direction perpendicular to a direction from a discharge space 41 to a base material W. The electrode 30 has a discharge surface for forming the discharge space 41 and a back face on a side opposite to the discharge surface. A groove 34 extended in the first direction is formed in the back face of the electrode 30. Thereby, the electrode 30 has the sectional shape with high bending rigidity. <P>COPYRIGHT: (C)2007,JPO&INPIT |
