Measuring device for inspecting substrate upper surface, has positioning system adjusted for positioning of head within surface of substrate, and generator coupled with opening so that head is positioned in height above substrate

摘要

The device has a measuring head (210) including a sensor (211) for detection of an upper surface and a pneumatic element (212) arranged adjacent to the sensor. A planar positioning system (220) is adjusted for precise positioning of the measuring head within an x-y flat surface of the substrate. A compressed air generator (250) is pneumatically coupled with an inlet opening (215) so that the measuring head is positioned in a preset height above the substrate during an impact of the pneumatic element with compressed air.