| 摘要 |
PROBLEM TO BE SOLVED: To provide an illuminator for inspecting a substrate constituted so as to miniaturize a liquid crystal scattering plate for changing over the illumination light thrown on an inspection substrate to spot light source illumination and surface light source illumination while preventing the broken pieces of the liquid crystal scattering plate from falling on the inspection substrate even if the liquid crystal scattering plate is broken and to obtain a bright diffracted bright line by irradiating the inspection substrate with scattered light when the spot light source illumination is set. SOLUTION: The liquid crystal scattering plate (4) is arranged at a position, where the cross-sectional shape of an illumination luminous flux becomes equal to or larger than the inspection substrate (K), on the side of a light source device (2) from a Flesnel lens (3) and the non-scattered light emitted from the light source device (2) is thrown on the liquid crystal scattering plate (4) to selectively irradiate the inspection substrate (K) with the non-scattered light becoming the spot light source illumination and the scattered light becoming the surface light source illumination. COPYRIGHT: (C)2007,JPO&INPIT
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