PRESSURE SENSOR HAVING A HIGH FULL-SCALE VALUE WITH PACKAGE THEREOF

摘要

In a pressure sensor (35) , a pressure-sensor element (10) has a monolithic body (12) of semiconductor material, and a first main face (12a) and a second main face (12b) acting on which is a stress resulting from a pressure (P) the value of which is to be determined; and a package (36) encloses the pressure­sensor element (10) . The package (36) has an inner chamber (37) containing liquid material (38), and the -ores sure-sensor element (10) is arranged within the inner chamber (37) in such a manner that the first and second main faces (12a, 12b) are both in contact with the liquid material (38). In particular, the liquid material is a silicone gel.