PROBE CONTROL APPARATUS AND PROBE CONTROL METHOD FOR MEASURING PROBE POSITION

摘要

PROBLEM TO BE SOLVED: To provide a probe control apparats which improves a probing system in precision. SOLUTION: The probe control apparatus comprises: a probe image position detecting section which detects an image and a position of a probe 61; an image processing section which applies an image processing to a detected probe image and generates a probe geometry; and a geometry judging section which judges as to whether the generated probe geometry is normal. COPYRIGHT: (C)2007,JPO&INPIT