| 摘要 |
PROBLEM TO BE SOLVED: To improve a yield in processing a cavity plate which composes a liquid droplet delivery head. SOLUTION: In a manufacturing method of the liquid droplet delivery head which comprises a joining process for joining a glass substrate 2 wherein an electrode 8 and an electrode terminal 11 are formed and a silicon substrate 41 wherein a plurality of recesses which become a delivery chamber 5 for making a liquid stored and discharged are at least formed with setting the electrode 8 against the base of the delivery chamber 5 through a gap G and a wet etching process in which the portions to be a liquid passage including at least the delivery chamber 5 and to be an electrode taking-out port 25 corresponding to the electrode terminal 11 are formed in the silicon substrate 41 joined with the glass substrate 2, a boron is alternatively diffused only into a predetermined membrane forming scheduled portion among the portions wherein the membrane is formed in the wet etching process for the silicon substrate 41 before being joined with the glass substrate 2, and after that the boron of the silicon substrate 41 is diffused to the whole area of the side where the boron has been diffused. COPYRIGHT: (C)2007,JPO&INPIT
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