| 摘要 |
A semiconductor device capable of preventing the occurrence of stress in a field region, and to prevent dislocation, caused by the stress, in the active region is provided. The semiconductor device includes a support substrate; an active island region having single crystal silicon being formed on the support substrate; a CVD film being configured to surround a periphery of the active island region; a boundary between the active island region and the CVD film having an interstice portion being formed therein, the interstice portion being configured to surround the single crystal silicon layer; and a first insulating film being configured to bury the interstice portion.
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