| 摘要 |
PROBLEM TO BE SOLVED: To provide a bellows seal valve capable of letting large flow rate of gas flow smoothly by high conductance, preventing a particle and a product from adhering to the inside of a main body, and improving gas substitution characteristic. SOLUTION: This bellows seal valve is constituted by constituting a body 10 by communicating an inclined cylinder 13 with a valve main body 11 having a flow passage port 12 and providing the flow passage port 12 by a valve element 23 on a tip side of a stem 22 arranged in the inclined cylinder 13 to open and close freely. The inside of bellows 28 sealing the stem 22 is arranged on a flow passage port 12 side, and a gasket 26 for back seal is provided in at least either of the valve element 23 and a bellows flange 21 fixing the bellows 28 to seal the inside of the bellows 28 by the gasket 23 when the valve element 23 is opened. COPYRIGHT: (C)2007,JPO&INPIT
|
