Load lock chamber for fabrication of semiconductor device,申请号KR20050087016-传众专利搜索

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发明名称	Load lock chamber for fabrication of semiconductor device
摘要
申请公布号	KR20070032114(A)	申请公布日期	2007.03.21
申请号	KR20050087016	申请日期	2005.09.16
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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