发明名称 METHOD OF CUTTING FUSE OF THE SEMICONDUCTOR DEVICE
摘要 A method for cutting a fuse in a semiconductor device is provided to improve the stability of device by restraining the influence of a laser beam on an unwanted fuse using an improved hole arrangement. A method of cutting a fuse in a semiconductor device is used for cutting at least one out of a plurality of fuses(402 to 404) spaced apart from each other in an insulating layer(400). A plurality of holes(411) for exposing partially the fuses to the outside are formed through the insulating layer. The plurality of holes are arranged like a zigzag type structure. A fuse only is cut through a corresponding hole by using a laser beam.
申请公布号 KR20070025574(A) 申请公布日期 2007.03.08
申请号 KR20050081880 申请日期 2005.09.02
申请人 HYNIX SEMICONDUCTOR INC. 发明人 AHN, KYONG JUN
分类号 H01L21/82 主分类号 H01L21/82
代理机构 代理人
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