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发明名称
Semiconductor manufacturing apparatus
摘要
A semiconductor manufacturing apparatus has a nozzle with a plurality of tiny holes. The nozzle Is connected to a vacuum pump through a valve without closing its end so as to be evacuated and purged independently of the reaction chamber.
申请公布号
US2007051310(A1)
申请公布日期
2007.03.08
申请号
US20060511507
申请日期
2006.08.29
申请人
ELPIDA MEMORY, INC
发明人
KOYANAGI KENICHI
分类号
C23C16/00
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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