Scalable multi-functional and multi-level nano-crystal non-volatile memory device

摘要

A multi-functional and multi-level memory cell is comprised of a tunnel layer formed over a substrate. In one embodiment, the tunnel layer is comprised of two layers such as HfO₂ and LaAlO₃. A charge blocking layer is formed over the tunnel layer. In one embodiment, this layer is formed from HfSiON. A control gate is formed over the charge blocking layer. A discrete trapping layer is embedded in either the tunnel layer or the charge blocking layer, depending on the desired level of non-volatility. The closer the discrete trapping layer is formed to the substrate/insulator interface, the lower the non-volatility of the device. The discrete trapping layer is formed from nano-crystals having a uniform size and distribution.